Degasser

GO Element provides Degasser to remove inert gas dissolved in liquid precursor. The degasser, which has been verified through many experiments, is a standardized product and can be easily applied to the customer's choice of valve manifold only for the purpose of use.
If degasser is necessary, we recommend that you consult with the technical sales representatlve of GO Element fully.

When using a vaporizer to forcibly vaporize a liquid precursor, a high-pressure inert gas is injected into the canister to inject the liquid precursor into the vaporizer, where some gases are absorbed by the liquid precursor.
The inert gas absorbed by the liquid precursor is ejected into the gas as the pressure inside the liquid mass flow meter (LMFC) lowers and interferes with the stable utilization of the LMFC. Thus, the inert gas injected into the liquid precursor by pressure must be removed before the liquid precursor reaches the LMFC.