Vaporizer

If the vapor pressure of the liquid precursor is not high or if the amount of gas precursor to be fed in the reactor is large, a vaporizer should be used to feed the desired amount of gas precursor to the reactor, The vaporizer consists of an atomizer that ejects a liquid precursor to maximize the surface area of the liquid precursor by droplet combination, and a heating chamber that transfers heat energy to the droplet to assist vaporization.

Forcing liquid precursors through a vaporizer is very difficult and requires a lot of careful reviews. GO Element provides customers with a method of vaporization.

GO Element offers three types of vaporization to ensure the most appropriate process environment according to the vaporization requirement and precursor type. It is recommended that you consult with the technical sales representative of GO Element for proper selsction.